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AuthorAwad, Yousef (1)
Beauvais, Jacques (1)
Cloutier, Melanie (1)Drouin, Dominique (1)Kelkar, Prasad (1)... View MoreSubjectDielectric nitrides (1)
Etching (1)
Nanolithography (1)Nanopatterning (1)
Nickel (1)
... View MorePublication date
2004 (1)
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Article (1)

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Arrays of holes fabricated by electron-beam lithography combined with image reversal process using nickel pulse reversal plating

Awad, Yousef; Lavallée, Eric; Lau, Kien Mun; Beauvais, Jacques; Drouin, Dominique; Cloutier, Melanie; Turcotte, David; Yang, Pan; Kelkar, Prasad (2004)
Abstract : A critical issue in fabricating arrays of holes is to achieve high-aspect-ratio structures. Formation of ordered arrays of nanoholes in silicon nitride was investigated by the use of ultrathin hard etch mask ...

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