Search
Now showing documents 1-10 of 117
Spectroscopic ellipsometry on thin titanium oxide layers grown on titanium by plasma oxidation
(2011)
Abstract : Electronic devices based on tunnel junctions require tools able to accurately control the thickness of thin metal and oxide layers on the order of the nanometer. This article shows that multisample ellipsometry ...
Depletion layer imaging using a gaseous secondary electron detector in an environmental scanning electron microscope
(1999)
Abstract : We present a method for imaging depletion layers using the gaseous secondary electron detector (GSED) employed in environmental scanning electron microscopes. GSED images of a p-np-n junction were obtained from ...
Fabrication of p-type porous GaN on silicon and epitaxial GaN
(2013)
Abstract : Porous GaN layers are grown on silicon from gold or platinum catalyst seed layers, and self-catalyzed on epitaxial GaN films on sapphire. Using a Mg-based precursor, we demonstrate p-type doping of the porous ...
Single-electron transistors with wide operating temperature range
(2007)
Abstract : Single-electron transistors are fabricated with a planar self-aligned process using chemical mechanical polishing. The method is demonstrated with Ti∕TiOxTi∕TiOx junctions and resistless lithography. The device ...
Evaluating methane oxidation efficiencies in experimental landfill biocovers by mass balance and carbon stable isotopes
(2012)
Abstract: Biocovers are an alternative for mitigating fugitive and residual emissions of methane from landfills. In this study, we evaluated the performance of two experimental passive methane oxidation biocovers (PMOBs) ...
Deep germanium etching using time multiplexed plasma etching
(2015)
Abstract : There is a growing need for patterning germanium for photonic and photovoltaics applications.
In this paper, the authors use a time multiplexed plasma etch process (Bosch process) to deep
etch a germanium ...
Method for fabricating submicron silicide structures on silicon using a resistless electron beam lithography process
(1997)
Abstract : A novel resistless lithography process using a conventional electron beam system is presented. Metallic lines with widths of less than 50 nm were produced on silicon substrates. The process is based on localized ...
Methanotrophs and methanotrophic activity in engineered landfill biocovers
(2009)
Abstract: The dynamics and changes in the potential activity and community structure of methanotrophs in landfill covers, as a function of time and depth were investigated. A passive methane oxidation biocover (PMOB-1) was ...
Biocover performance of landfill methane oxidation: Experimental results
(2010)
Abstract: An experimental passive methane oxidation biocover (PMOB) was constructed within the existing final cover of the St-Nicéphore landfill. Its substrate consisted of a 0.80-m-thick mixture of sand and compost. The ...
Determination of the soil water characteristic curve of highly compressible materials: Case study of pulp and paper by-product
(2004)
Abstract: A technique was developed for the determination of various points of the soil-water characteristic curve (SWCC)—including the air
entry value (AEV)—of compressible materials from one single test. The testing ...