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    • A fabrication process for emerging nanoelectronic devices based on oxide tunnel junctions

      Drouin, Dominique; Droulers, Gabriel; Labalette, Marina; Sang, Bruno Lee; Harvey-Collard, Patrick; Souifi, Abdelkader; Jeannot, Simon; Monfray, Stéphane; Pioro-Ladrière, Michel; Ecoffey, Serge (2017)
      Abstract : We present a versatile nanodamascene process for the realization of low-power nanoelectronic devices with different oxide junctions. With this process we have fabricated metal/insulator/metal junctions, metallic ...