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dc.contributor.authorDrouin, Dominiquefr
dc.contributor.authorDroulers, Gabrielfr
dc.contributor.authorLabalette, Marinafr
dc.contributor.authorSang, Bruno Leefr
dc.contributor.authorHarvey-Collard, Patrickfr
dc.contributor.authorPioro-Ladrière, Michelfr
dc.contributor.authorEcoffey, Sergefr
dc.contributor.otherSouifi, Abdelkaderfr
dc.contributor.otherJeannot, Simonfr
dc.contributor.otherMonfray, Stéphanefr
dc.description.abstractAbstract : We present a versatile nanodamascene process for the realization of low-power nanoelectronic devices with different oxide junctions. With this process we have fabricated metal/insulator/metal junctions, metallic single electron transistors, silicon tunnel field effect transistors, and planar resistive memories. These devices do exploit one or two nanometric-scale tunnel oxide junctions based on TiO2, SiO2, HfO2, Al2O3, or a combination of those. Because the nanodamascene technology involves processing temperatures lower than 300°C, this technology is fully compatible with CMOS back-end-of-line and is used for monolithic 3D
dc.relation.ispartofJournal of nanomaterialsfr
dc.rightsAttribution - Pas d’Utilisation Commerciale - Pas de Modification 2.5 Canada*
dc.subjectNanoelectronic devicesfr
dc.subjectOxide tunnel junctionsfr
dc.titleA fabrication process for emerging nanoelectronic devices based on oxide tunnel junctionsfr
udes.description.typepubRévisé et accepté par des pairsfr
udes.description.diffusionDiffusé par Savoirs UdeS, le dépôt institutionnel de l'Université de Sherbrookefr
dc.identifier.bibliographicCitationDrouin, D., Droulers, G., Labalette, M., Sang, B. L., Harvey-Collard, P., ... Pioro-Ladrière, M., Ecoffey, S. (2017). A fabrication process for emerging nanoelectronic devices based on oxide tunnel junctions. Journal of nanomaterials, 2017, 1-8.
udes.description.sourceJournal of nanomaterialsfr
udes.description.ordreauteursDrouin, Dominique; Droulers, Gabriel; Labalette, Marina; Sang, Bruno Lee; Harvey-Collard, Patrick; Souifi, Abdelkader; Jeannot, Simon; Monfray, Stéphane; Pioro-Ladrière, Michel; Ecoffey, Sergefr

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Attribution - Pas d’Utilisation Commerciale - Pas de Modification 2.5 Canada
Except where otherwise noted, this document's license is described as Attribution - Pas d’Utilisation Commerciale - Pas de Modification 2.5 Canada